Semiconductor device

ABSTRACT

A semiconductor device includes pads arrayed between a region where a transistor portion or a diode portion is disposed and a first end side on an upper surface of a semiconductor substrate, and a gate runner portion that transfers a gate voltage to the transistor portion. The gate runner portion has a first gate runner disposed passing between the first end side of the semiconductor substrate and at least one of the pads in the top view, and a second gate runner disposed passing between at least one of the pads and the transistor portion in the top view. The transistor portion is also disposed in the inter-pad regions, the gate trench portion disposed in the inter-pad regions is connected to the first gate runner, and the gate trench portion arranged so as to face the second gate runner is connected to the second gate runner.

CROSS-REFERENCE TO RELATED APPLICATIONS

This application is a continuation of U.S. patent application Ser. No.16/794,227, filed on Feb. 19, 2020, which is a continuation ofInternational Patent Application No. PCT/JP2019/002590, filed on Jan.25, 2019, the entirety of each of which is incorporated herein byreference. The application also claims priority from the followingJapanese patent application, which is explicitly incorporated herein byreference:

-   No. 2018-047925 filed on Mar. 15, 2018.

BACKGROUND 1. Technical Field

The present invention relates to a semiconductor device.

2. Related Art

Up to now, a semiconductor device has been proposed in which atransistor device such as an insulated gate bipolar transistor (IGBT)and a diode device such as a free wheel diode (FWD) are disposed on thesame semiconductor substrate (for example, see patent document 1). Aplurality of pads connected to the transistor device, the diode device,or the like are disposed on the semiconductor substrate. Related-artliteratures include the following literatures.

-   Patent Document 1: Japanese Unexamined Patent Application    Publication No. 2017-147435-   Patent Document 2: Japanese Unexamined Patent Application    Publication No. 2017-69412-   Patent Document 3: Japanese Unexamined Patent Application    Publication No. 2007-173411

SUMMARY

A plurality of pads are arrayed along any one of sides of asemiconductor substrate. In a semiconductor device, a region between thepads is preferably efficiently used.

To address the above-described issue, according to an aspect of thepresent invention, a semiconductor device including a semiconductorsubstrate is provided. The semiconductor device may include a transistorportion and a diode portion that are disposed on the semiconductorsubstrate. The semiconductor device may include a plurality of padsdisposed above an upper surface of the semiconductor substrate andarrayed in an array direction between a region where the transistorportion or the diode portion is disposed and a first end side on theupper surface of the semiconductor substrate. The semiconductor devicemay include a gate runner portion that transfers a gate voltage to thetransistor portion. The transistor portion may include a gate trenchportion disposed extending in an extension direction that is differentfrom the array direction in a top view. The gate runner portion mayinclude a first gate runner disposed passing between the first end sideof the semiconductor substrate and at least one of the pads in the topview. The gate runner portion may include a second gate runner disposedpassing between at least one of the pads and the transistor portion inthe top view. The transistor portion may also be disposed in at leastone of inter-pad regions each sandwiched by two pads in the top view.The gate trench portion disposed in the at least one inter-pad regionmay be connected to the first gate runner. The gate trench portionarranged so as to face the second gate runner in the extension directionmay be connected to the second gate runner.

The second gate runner may be disposed along at least two sides of atleast one of the pads.

A distance between each pad and the second gate runner may be 200 μm orshorter in the top view.

The diode portion may include a first conductivity type cathode regionexposed on a lower surface of the semiconductor substrate. The cathoderegion may not be disposed in the inter-pad region.

The transistor portion may include a first conductivity type emitterregion that is exposed on the upper surface of the semiconductorsubstrate and in contact with the gate trench portion. The semiconductordevice may include an emitter electrode disposed above the upper surfaceof the semiconductor substrate and connected to the emitter region. Thediode portion may include dummy trench portions disposed extending inthe extension direction and connected to the emitter electrode. At leastone of the dummy trench portions that are arranged so as to face theinter-pad regions in the extension direction may be disposed extendingup to a corresponding one of the inter-pad regions.

The transistor portion may include a first conductivity type emitterregion that is exposed on the upper surface of the semiconductorsubstrate and in contact with the gate trench portion. The semiconductordevice may include an emitter electrode disposed above the upper surfaceof the semiconductor substrate and connected to the emitter region. Thediode portion may include a first conductivity type cathode regionexposed on a lower surface of the semiconductor substrate. The diodeportion may include a dummy trench portion disposed extending in theextension direction and connected to the emitter electrode. The cathoderegion and the dummy trench portion may be disposed in at least one ofthe inter-pad regions.

The transistor portion may include a first conductivity type emitterregion that is exposed on the upper surface of the semiconductorsubstrate and in contact with the gate trench portion. At least the gatetrench portion which is the closest to either of the two pads in theinter-pad region may not have the emitter region disposed in contactwith the gate trench portion in the inter-pad region.

The transistor portion may include a first conductivity type emitterregion that is exposed on the upper surface of the semiconductorsubstrate and in contact with the gate trench portion. The semiconductordevice may include an emitter electrode disposed above the upper surfaceof the semiconductor substrate and connected to the emitter region. Thesemiconductor device may include an interlayer dielectric film disposedbetween the semiconductor substrate and the emitter electrode. A contacthole that connects the emitter electrode to the semiconductor substratemay be disposed in the interlayer dielectric film between the gatetrench portion which is the closest to either of the two pads in theinter-pad region and the pad.

A dummy trench portion connected to the emitter electrode may bedisposed between the gate trench portion which is the closest to eitherof the two pads in the inter-pad region and the pad.

Each of the plurality of pads may be disposed in such a position thatthe pad at least partially faces the diode portion in the extensiondirection.

The summary clause does not necessarily describe all necessary featuresof the embodiments of the present invention. The present invention mayalso be a sub-combination of the features described above.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a drawing illustrating a structure of an upper surface of asemiconductor device 100 according to an embodiment of the presentinvention.

FIG. 2 is an enlarged view of an area in the vicinity of a region A inFIG. 1 .

FIG. 3 is a drawing illustrating an example of a cross section takenalong B-B in FIG. 2 .

FIG. 4 is an enlarged view of an area in the vicinity of a region B inFIG. 1 .

FIG. 5 is an enlarged view of an area in the vicinity of a region C inFIG. 1 .

FIG. 6 is a drawing illustrating an arrangement example of an emitterelectrode 52 in a top view.

FIG. 7 is a drawing illustrating an arrangement example of a cathoderegion 82.

FIG. 8 is an enlarged view of an area in the vicinity of a region D inFIG. 7 .

FIG. 9 is a drawing illustrating another arrangement example of thecathode region 82.

FIG. 10 is an enlarged view of an area in the vicinity of a region E inFIG. 9 .

FIG. 11 illustrates another example of the region B in FIG. 1 .

FIG. 12 is a drawing illustrating an arrangement example of gate trenchportions 40 in a main active portion 120 and an inter-pad region 130.

FIG. 13 is a drawing illustrating another arrangement example of thegate trench portions 40 in the main active portion 120 and the inter-padregion 130.

FIG. 14 is a drawing illustrating another arrangement example of thegate trench portions 40 in the main active portion 120 and the inter-padregion 130.

DESCRIPTION OF EXEMPLARY EMBODIMENTS

Hereinafter, the present invention will be described by way ofembodiments, but the following embodiments are not intended to limit theinvention described in the scope of the invention. In addition, not allcombinations of features described in the embodiments necessarily haveto be essential to solving means of the invention.

One side in a direction parallel to a depth direction of a semiconductorsubstrate is referred to as an “upper” side, and the other side isreferred to as a “lower” side in the present specification. One surfaceout of two main surfaces of a substrate, a layer, a layer, or othercomponents is referred to as an upper surface, and the other surface isreferred to as a lower surface. The “upper” and “lower” directions arenot limited to the gravitational direction or an attachment direction atthe time of mounting of a semiconductor device to the substrate or thelike.

According to the present specification, technical matters may bedescribed using orthogonal coordinate axes of an X axis, a Y axis and aZ axis in some cases. According to the present specification, a plane inparallel with an upper surface of the semiconductor substrate is set asan XY plane, and the depth direction perpendicular to the upper surfaceof the semiconductor substrate is set as the Z axis.

According to the respective embodiments, examples are illustrated wherea first conductivity type is set as an N type, and a second conductivitytype is set as a P type, but the first conductivity type may also be setas the P type, and the second conductivity type may also be set as the Ntype. In this case, conductivity types of a substrate, a layer, aregion, and the like according to the respective embodimentsrespectively have opposite polarities. In addition, in a case where a P+type (or an N+ type) is described in the present specification, it meansthat a doping concentration is higher than the P type (or the N type),and in a case where a P− type (or an N− type) is described, it meansthat the doping concentration is lower than the P type (or the N type).

The doping concentration in the present specification refers to aconcentration of impurities transformed to donors or acceptors. In thepresent specification, a difference between concentrations of donors andacceptors may be set as the doping concentration in some cases. Inaddition, a peak value of a doping concentration distribution in adoping region may be set as the doping concentration in the dopingregion in some cases.

FIG. 1 is a drawing illustrating a structure of an upper surface of asemiconductor device 100 according to an embodiment of the presentinvention. The semiconductor device 100 includes a semiconductorsubstrate 10. The semiconductor substrate 10 may be a silicon substrate,may be a silicon carbide substrate, or may also be a nitridesemiconductor substrate such as gallium nitride, or the like. Thesemiconductor substrate 10 in this example is a silicon substrate.

In the present specification, an end portion of an outer circumstance ofthe semiconductor substrate 10 in a top view is set as an outerperipheral end 140. The top view refers to a case where observation isperformed from an upper surface side of the semiconductor substrate 10in parallel with the Z axis. In addition, any one of end sides in theouter peripheral end 140 of the semiconductor substrate 10 in the topview is set as a first end side 142. A direction in parallel with thefirst end side 142 in the top view is set as an X axis direction, and adirection perpendicular to the first end side 142 is set as a Y axisdirection.

The semiconductor device 100 includes a main active portion 120 and anedge terminal structure portion 90. The main active portion 120corresponds to an area in an active region where a current flows in thedepth direction inside the semiconductor substrate 10 from the uppersurface of the semiconductor substrate 10 to the lower surface, or fromthe lower surface to the upper surface, excluding an inter-pad region130 which will be described. For example, the active region is a regionwhere a principal current flows between the upper surface and the lowersurface of the semiconductor substrate 10 in a case where a transistordevice included in the semiconductor device 100 is controlled to be inan on state, or a case where the transistor device is shifted from theon state to an off state. The main active portion 120 may also refer toa region excluding the pads and the inter-pad region 130 in a regionsurrounded by a first gate runner 50 which will be described below.

A transistor portion 70 and a diode portion 80 are disposed in the mainactive portion 120. In the present specification, each of the transistorportion 70 and the diode portion 80 may be referred to as a deviceportion or a device region in some cases. In this example, thetransistor portions 70 and the diode portions 80 are alternatelydisposed in the main active portion 120 in the X axis direction.

A plurality of pads (in the example of FIG. 1 , a sensing pad 114, anemitter pad 115, a gate pad 116, a cathode pad 117, and an anode pad118) are disposed above the upper surface of the semiconductor substrate10. The sensing pad 114 is connected to a current sensing device 119.The current sensing device 119 has the same structure as the transistorportion 70, and also has the smaller area in the top view (correspondingto the area of the channel) than the transistor portion 70. When acurrent flowing through the current sensing device 119 is detected, acurrent flowing through the entire semiconductor device 100 can beestimated. The emitter pad 115 is connected to an emitter electrodearranged above the upper surface of the semiconductor substrate 10. Thegate pad 116 is connected to a gate electrode of the transistor portion70. The gate pad 116 in this example is connected to a gate runnerportion which will be described below. The cathode pad 117 and the anodepad 118 are connected to a temperature sensing portion 110 which will bedescribed below. It is noted that the number and the type of the padsdisposed in the semiconductor substrate 10 are not limited to theexample illustrated in FIG. 1 .

Each of the pads is formed of a metallic material such as aluminum. Theplurality of pads are arrayed in a predetermined array direction betweenthe main active portion 120 and the first end side 142 on the uppersurface of the semiconductor substrate 10. The plurality of pads in thisexample are arranged to be sandwiched by the device region and the firstend side 142 in the Y axis direction.

The array direction of the plurality of pads may be a direction of astraight line that links centers of two pads (in this example, thesensing pad 114 and the anode pad 118) arranged at both ends in thedirection in parallel with the first end side 142 in the top view amongthe plurality of pads. The array direction may be the direction inparallel with the first end side 142. The array direction may also havean inclination up to 30 degrees with respect to the first end side 142.The inclination may be up to 20 degrees, and may also be up to 10degrees. The array direction in this example is in parallel with thefirst end side 142.

The region sandwiched by two pads in the top view is set as theinter-pad region 130. The inter-pad region 130 in this example is anoverlapped region where two pad regions extend towards the mutual padsin a direction in parallel with the X axis. In this example, a regionbetween the overlapped region and the first gate runner 50 disposedalong the first end side 142 is also included in the inter-pad region130.

In the semiconductor device 100, the device region is also disposed inat least one of the inter-pad regions 130. In this example, thetransistor portion 70 is disposed in at least one of the inter-padregions 130. In accordance with the above-mentioned structure, the areaof the device region can be increased by effectively using the inter-padregions 130.

The semiconductor device 100 includes the gate runner portion thattransfers a gate voltage to the transistor portion 70. The semiconductordevice 100 in this example includes the first gate runner 50, a secondgate runner 51, and a third gate runner 48 as the gate runner portions.In this example, each of the gate runners is disposed above the uppersurface of the semiconductor substrate 10 and insulated from the uppersurface of the semiconductor substrate 10 by an interlayer dielectricfilm.

The first gate runner 50 is disposed passing between the first end side142 of the semiconductor substrate 10 and at least one of the pads inthe top view. The first gate runner 50 in this example is disposed inparallel with the first end side 142 passing between each of the sensingpad 114, the emitter pad 115, the gate pad 116, the cathode pad 117, andthe anode pad 118, and the first end side 142. The first gate runner 50is connected to the gate pad 116.

In addition, the first gate runner 50 is disposed so as to surround themain active portion 120 between the other end side of the semiconductorsubstrate 10 and the main active portion 120. In other words, the firstgate runner 50 in this example is circularly disposed along each of theend sides of the semiconductor substrate 10. The gate runner 50 may be ametallic wiring such as aluminum, or may also be a semiconductor wiringsuch as polysilicon into which impurities are doped. The first gaterunner 50 may have a structure in which the metallic wiring and thesemiconductor wiring are disposed to be overlapped with each other withthe intermediation of a dielectric film A contact hole that connects themetallic wiring to the semiconductor wiring is disposed in thedielectric film. The first gate runner 50 in this example is a metallicwiring.

A material of the second gate runner 51 and the third gate runner 48 maybe a material similar to the material described with respect to thefirst gate runner 50. The second gate runner 51 is a metallic wiring inthis example, and the third gate runner 48 is a semiconductor wiring.

The second gate runner 51 is disposed passing between at least one ofthe pads and the transistor portion 70 in the top view. The at least oneof the pads is a pad other than the emitter pad 115. The second gaterunner 51 in this example is disposed with respect to all the padsexcluding the emitter pad 115. The second gate runner 51 is arranged tobe sandwiched by the pad and the main active portion 120 (that is, thetransistor portion 70 and the diode portion 80) in the Y axis direction.In any one of the pads, the second gate runner 51 may be arranged alongtwo or more of sides of the pad.

For example, in a pad (in this example, the anode pad 118) arranged inone end in the X axis direction, the second gate runner 51 is arrangedalong two intersecting sides, and also the first gate runner 50 isarranged along the other two sides.

In addition, the current sensing device 119 is disposed in the inter-padregion 130 between a pad (in this example, the sensing pad 114) arrangedin the other end in the X axis direction and the emitter pad 115. Thetransistor portion 70 and the diode portion 80 may not be disposed inthe inter-pad region 130 where the current sensing device 119 isdisposed. In one example, a P+ type well region which will be describedbelow may be disposed in the area where the current sensing device 119is not disposed in the inter-pad region 130.

Each pad in this example includes two pairs of parallel sides in the topview. In the example of FIG. 1 , each pad includes two sides in parallelwith the X axis and two sides in parallel with the Y axis. The gaterunner portion may not be disposed in a side facing the current sensingdevice 119 among the sides of the pad. In the sensing pad 114 in thisexample, the second gate runner 51 is arranged along one side facing themain active portion 120. The gate runner portion is not disposed in theside facing the current sensing device 119, and the first gate runner 50is arranged along the other two sides. The second gate runner 51arranged along the sensing pad 114 may be connected to the second gaterunner 51 disposed along the other pad via the third gate runner 48.

More specifically, the two second gate runners 51 disposed in the twopads (in this example, the sensing pad 114 and the gate pad 116)arranged to sandwich the emitter pad 115 in the X axis direction may beconnected to each other via the third gate runner 48. The third gaterunner 48 is arranged between the main active portion 120, and theemitter pad 115 and the inter-pad region 130 in the Y axis direction.

In addition, the second gate runner 51 is arranged along three sidesthat do not include the side facing the first end side 142 in the pads(in this example, the gate pad 116 and the cathode pad 117) disposed inpositions excluding both ends in the X axis direction, and the firstgate runner 50 is arranged along the side facing the first end side 142.The gate runner portions disposed in the surrounding of each pad aremutually connected to circularly surround the pad.

The transistor portion 70 includes a gate trench portion disposedextending in an extension direction (in this example, the Y axisdirection) that is different from the array direction in the top view. Astructure of the gate trench portion will be described below. The gatetrench portion disposed in the inter-pad region 130 is directly orindirectly connected to the first gate runner 50 disposed along thefirst end side 142. In other words, the gate trench portion disposed inthe inter-pad region 130 is disposed extending in the Y axis directionup to a position where the gate trench portion can be directly orindirectly connected to the first gate runner 50 arranged along thefirst end side 142 of the semiconductor substrate 10.

In addition, the gate trench portion of the main active portion 120which is arranged so as to face the second gate runner 51 in theextension direction (Y axis direction) is directly or indirectlyconnected to the second gate runner 51. In other words, the gate trenchportion arranged so as to face, in the Y axis direction, the second gaterunner 51 extending in the X axis direction between the pad and the mainactive portion 120 is directly or indirectly connected to the secondgate runner 51.

In accordance with the above-mentioned configuration, the gate trenchportion of the transistor portion disposed in the main active portion120 and the inter-pad region 130 can be connected to the gate runnerportion. It is noted that when the first gate runner 50 and the secondgate runner 51 are set as the metallic wirings, variation in timings fortransferring the gate voltages to the respective gate trench portionsand variation in attenuation amounts of the gate voltages can bereduced.

In addition, among the gate trench portions disposed in the main activeportion 120, the gate trench portion disposed in a position facing thethird gate runner 48 in the Y axis direction may be connected to thethird gate runner 48. In addition, the gate trench portion disposed in aposition facing the first gate runner 50 that is arranged along the endside opposite to the first end side 142 may be directly or indirectlyconnected to the first gate runner 50.

The transistor portion 70 includes a transistor such as an IGBT. Thediode portion 80 and the transistor portions 70 are alternately arrangedon the upper surface of the semiconductor substrate 10 in the X axisdirection. An N+ type cathode region is disposed in a region in contactwith the lower surface of the semiconductor substrate 10 in each of thediode portions 80. The diode portion 80 indicated by a solid line inFIG. 1 is a region where the cathode region is disposed on the lowersurface of the semiconductor substrate 10. In the semiconductor device100 in this example, regions excluding the cathode region among regionsin contact with the lower surface of the semiconductor substrate are P+type collector regions.

The diode portion 80 is a region where the cathode region is projectedin a Z axis direction. The transistor portion 70 is a region where thecollector region is formed on the lower surface of the semiconductorsubstrate 10, and a unit structure including an N+ type emitter regionis periodically formed on the upper surface of the semiconductorsubstrate 10. A region obtained by extending the region where thecathode region is projected in the Z axis direction in the active regionin the Y axis direction may also be set as the diode portion 80. Aregion excluding the diode portion 80 may also be set as the transistorportion 70. A boundary between the diode portion 80 and the transistorportion 70 in the X axis direction is a boundary between the cathoderegion and the collector region.

The transistor portion 70 may be disposed at both ends in the mainactive portion 120 in the Y axis direction. The main active portion 120may be divided by the third gate runner 48 in the Y axis direction. Inthe respective divided regions of the main active portion 120, thetransistor portions 70 and the diode portions 80 are alternatelyarranged in the X axis direction. In the example of FIG. 1 , the mainactive portion 120 is divided into three by two pieces of the third gaterunners 48 extending in the X axis direction. In addition, the thirdgate runner 48 formed of a semiconductor may also be disposed along thefirst gate runner 50 and the second gate runner 51 which are formed of ametal.

The edge terminal structure portion 90 is disposed between the firstgate runner 50 and the outer peripheral end 140 of the semiconductorsubstrate 10 on the upper surface of the semiconductor substrate 10. Theedge terminal structure portion 90 may be circularly arranged tosurround the first gate runner 50 on the upper surface of thesemiconductor substrate 10. The edge terminal structure portion 90 inthis example is arranged along the outer peripheral end 140 of thesemiconductor substrate 10. The edge terminal structure portion 90mitigates electric field concentration on the upper surface side of thesemiconductor substrate 10. The edge terminal structure portion 90includes, for example, a structure of a guard ring, a field plate, aRESURF, and a combination of these.

The semiconductor device 100 in this example includes the temperaturesensing portion 110 and temperature sensing wirings 112-1 and 112-2. Thetemperature sensing portion 110 is disposed above the main activeportion 120. The temperature sensing portion 110 may be disposed in amiddle of the main active portion 120 in the top view of thesemiconductor substrate 10. The temperature sensing portion 110 may bedisposed above the transistor portion 70 in the top view of thesemiconductor substrate 10. The temperature sensing portion 110 senses atemperature of the main active portion 120. The temperature sensingportion 110 may be a pn type temperature sensing diode formed ofmonocrystalline or polycrystalline silicon.

The temperature sensing wiring 112 is disposed above the main activeportion 120. The temperature sensing wiring 112 may be a semiconductorwiring. The temperature sensing wiring 112 is connected to thetemperature sensing portion 110. The temperature sensing wiring 112extends up to a region between the main active portion 120 and the outerperipheral end 140 on the upper surface of the semiconductor substrate10 and is connected to the cathode pad 117 and the anode pad 118. It isnoted that the semiconductor device 100 may not include the temperaturesensing portion 110 and the temperature sensing wiring 112. In addition,the semiconductor device 100 may not include the current sensing device119.

FIG. 2 is an enlarged view of an area in the vicinity of a region A inFIG. 1 . The region A includes the transistor portion 70, the diodeportion 80, the first gate runner 50, and the edge terminal structureportion 90. In this example, the third gate runner 48 is disposed alongthe first gate runner 50. The third gate runner 48 may be arrangedbetween the first gate runner 50 and the semiconductor substrate 10. Thefirst gate runner 50, the third gate runner 48, and the semiconductorsubstrate 10 are insulated from one another by the interlayer dielectricfilms. The semiconductor device 100 in this example includes a guardring 92, a gate trench portion 40, a dummy trench portion 30, a P+ typewell region 11, an N+ type emitter region 12, a P− type base region 14,and a P+ type contact region 15 that are disposed inside thesemiconductor substrate 10 and exposed on the upper surface of thesemiconductor substrate 10. In the present specification, the gatetrench portion 40 or the dummy trench portion 30 may be referred tosimply as a trench portion in some cases. In addition, the semiconductordevice 100 in this example includes an emitter electrode 52 and thefirst gate runner 50 that are disposed above the upper surface of thesemiconductor substrate 10. The emitter electrode 52 and the first gaterunner 50 are disposed to be separated from each other.

The edge terminal structure portion 90 is arranged on an outer side ofthe first gate runner 50 (positive side of the Y axis direction). Asdescribed above, the edge terminal structure portion 90 may include oneor more guard rings 92. The guard ring 92 is a P type region formedinside the semiconductor substrate 10. The guard ring 92 is circularlydisposed so as to surround the first gate runner 50 on the outer side ofthe first gate runner 50.

The interlayer dielectric film is formed between the emitter electrode52 and the first gate runner 50, and the upper surface of thesemiconductor substrate 10, but this is omitted in FIG. 2 . A contacthole 56, a contact hole 49, and a contact hole 54 are formed through theinterlayer dielectric film in this example.

The emitter electrode 52 is in contact with the emitter region 12, thecontact region 15, and the base region 14 on the upper surface of thesemiconductor substrate 10 via the contact hole 54. In addition, theemitter electrode 52 is connected to a dummy conductive portion insidethe dummy trench portion 30 via the contact hole 56. A connectingportion 25 formed of a material having conductivity such as polysiliconinto which impurities are doped may be disposed between the emitterelectrode 52 and the dummy conductive portion. A dielectric film such asan oxide film is formed between the connecting portion 25 and the uppersurface of the semiconductor substrate 10.

The first gate runner 50 is connected to the third gate runner 48 viathe contact hole 49 disposed in the interlayer dielectric film. Thethird gate runner 48 is connected to a gate conductive portion insidethe gate trench portion 40. The third gate runner 48 is not connected tothe dummy conductive portion inside the dummy trench portion 30. In thisexample, the gate trench portion 40 extends in the Y axis direction upto a position to be overlapped with the third gate runner 48, and thedummy trench portion 30 is arranged extending in the Y axis directionwithin a range where the dummy trench portion 30 is not overlapped withthe third gate runner 48.

The third gate runner 48 arranged along the first gate runner 50 isdisposed extending in the Y axis direction from a position where thethird gate runner is overlapped with the first gate runner 50 up to aposition where the third gate runner is not overlapped with the firstgate runner 50. The third gate runner 48 is connected to the gate trenchportion 40 in a position where the third gate runner is not overlappedwith the first gate runner 50. It is noted that the semiconductor device100 may not include the third gate runner 48 provided along the firstgate runner 50. In this case, the gate trench portion 40 may be directlyconnected to the first gate runner 50.

In the present specification, a state where the gate trench portion 40is directly connected to the first gate runner 50 (or the second gaterunner 51) refers to a state where the gate trench portion 40 isarranged extending up to a position where the gate trench portion isoverlapped with the first gate runner 50 (or the second gate runner 51),and the gate trench portion 40 is connected to the first gate runner 50(or the second gate runner 51) via the contact hole. A state where thegate trench portion 40 is indirectly connected to the first gate runner50 (or the second gate runner 51) refers to a state where the third gaterunner 48 overlapped with the first gate runner 50 (or the second gaterunner 51) is disposed extending in the Y axis direction up to aposition where the third gate runner is not overlapped with the firstgate runner 50 (or the second gate runner 51), and the gate trenchportion 40 is connected to the first gate runner 50 (or the second gaterunner 51) via the third gate runner 48. It is noted that in a casewhere the gate trench portion 40 is indirectly connected to the firstgate runner 50, the gate trench portion 40 and the third gate runner 48are connected to each other in the vicinity of the first gate runner 50.A distance in the Y axis direction between a connection point of thegate trench portion 40 and the third gate runner 48, and the first gaterunner 50 may be 10 times as long as a width of the first gate runner 50in the Y axis direction or shorter, or may also be 5 times as long asthe width of the first gate runner 50 or shorter. Similarly, in a casewhere the gate trench portion 40 is indirectly connected to the secondgate runner 51, the gate trench portion 40 and the third gate runner 48are connected to each other in the vicinity of the second gate runner51. A distance in the Y axis direction between the connection point ofthe gate trench portion 40 and the third gate runner 48, and the secondgate runner 51 may be 10 times as long as a width of the second gaterunner 51 in the Y axis direction or shorter, or may also be 5 times aslong as the width of the second gate runner 51 or shorter. In thepresent specification, direct connection and indirect connection may becollectively referred to as connection in some cases.

In this example, the emitter electrode 52 and the first gate runner 50are formed of a material including a metal. For example, at least a partof a region of each electrode is formed of aluminum or analuminum-silicon alloy. Each electrode may include a barrier metalformed of titanium, a titanium compound, or the like placed under aregion formed of aluminum or the like, and may also include a plugformed of tungsten or the like inside the contact hole.

One or more gate trench portions 40 and one or more dummy trenchportions 30 are arrayed at a predetermined interval along apredetermined array direction (in this example, the X axis direction) onthe upper surface of the semiconductor substrate 10. In the transistorportion 70 in this example, the one or more gate trench portions 40 andthe one or more dummy trench portions 30 are alternately formed alongthe array direction.

The gate trench portion 40 in this example may include two linearportions 39 linearly extending along the extension direction (in thisexample, the Y axis direction) perpendicular to the array direction andan edge portion 41 that connects the two linear portions 39. At least apart of the edge portion 41 is preferably formed to be curved on theupper surface of the semiconductor substrate 10. In the two linearportions 39 of the gate trench portion 40, since end portions that areeach an end of a linear shape along the extension direction areconnected by the edge portion 41, the electric field concentration atthe end portions of the linear portion 39 can be mitigated.

At least one of the dummy trench portions 30 is disposed between therespective linear portions 39 of the gate trench portion 40. These dummytrench portions 30 may include a linear portion 29 and an edge portion31 similarly as in the gate trench portion 40. In another example, thedummy trench portion 30 may include the linear portion 29 and may notinclude the edge portion 31. In the example illustrated in FIG. 3 , thetwo linear portions 29 of the dummy trench portion 30 are arrangedbetween the two linear portions 39 of the gate trench portion 40 in thetransistor portion 70.

In the diode portion 80, the plurality of dummy trench portions 30 arearranged on the upper surface of the semiconductor substrate 10 alongthe X axis direction. A shape of the dummy trench portion 30 in thediode portion 80 in the XY plane may be similar to that of the dummytrench portion 30 disposed in the transistor portion 70.

The edge portion 31 and the linear portion 29 of the dummy trenchportion 30 have shapes similar to those of the edge portion 41 and thelinear portion 39 of the gate trench portion 40. The dummy trenchportion 30 disposed in the diode portion 80 and the linear shaped dummytrench portion 30 disposed in the transistor portion 70 may have thesame length in the Y axis direction.

The emitter electrode 52 is formed above the gate trench portion 40, thedummy trench portion 30, the well region 11, the emitter region 12, thebase region 14, and the contact region 15. The well region 11 and one ofthe ends of the contact hole 54 in the extension direction that iscloser to where the first gate runner 50 is disposed are disposed awayfrom each other in the XY plane. A diffusion depth of the well region 11may be greater than both a depth of the gate trench portion 40 and adepth of the dummy trench portion 30. Parts of regions of the gatetrench portion 40 and the dummy trench portion 30 in the vicinity of thefirst gate runner 50 are formed in the well region 11. A bottom of theedge portion 41 of the gate trench portion 40 in the Z axis directionand a bottom of the edge portion 31 of the dummy trench portion 30 inthe Z axis direction may be covered with the well region 11.

One or more mesa portions 60 sandwiched by the respective trenchportions are disposed in each of the transistor portion 70 and the diodeportion 80. The mesa portion 60 refers to a region above the bottom ofthe trench portion at which the trench portion is deepest, in the regionof the semiconductor substrate 10 sandwiched by the trench portions.

The base region 14 is formed in the mesa portion 60 sandwiched by therespective trench portions. The base region 14 has a second conductivitytype having a doping concentration lower than that of the well region 11(P− type).

The second conductivity type contact region 15 having a higher dopingconcentration than the base region 14 is formed on an upper surface ofthe base region 14 of the mesa portion 60. The contact region 15 in thisexample has the P+ type. The well region 11 on the upper surface of thesemiconductor substrate 10 may be formed to be away in a direction ofthe first gate runner 50 from the contact region 15 arranged thefarthest in the Y axis direction of the contact regions 15. The baseregion 14 is exposed between the well region 11 and the contact region15 on the upper surface of the semiconductor substrate 10.

In the transistor portion 70, the first conductivity type emitter region12 having a higher doping concentration than a drift region formedinside the semiconductor substrate 10 is selectively formed on the uppersurface of the mesa portion 60-1. The emitter region 12 in this examplehas the N+ type. Apart that is of the base region 14 adjacent to theemitter region 12 in the depth direction (−Z axis direction) of thesemiconductor substrate 10 and that is in contact with the gate trenchportion 40 functions as a channel portion. When an ON-voltage is appliedto the gate trench portion 40, a channel corresponding to an inversionlayer for electrons is formed in a part adjacent to the gate trenchportion 40 in the base region 14 disposed between the emitter region 12and the drift region in the Z axis direction. When the channel is formedin the base region 14, carriers flow between the emitter region 12 andthe drift region.

In this example, the base regions 14-e are arranged in both end portionsof each of the mesa portions 60 in the Y axis direction. In thisexample, one of the regions adjacent to the base region 14-e that iscloser to the middle part of the mesa portion 60 on the upper surface ofeach of the mesa portions 60 is the contact region 15. In addition, theother region adjacent to the base region 14-e opposite to the contactregion 15 is the well region 11.

The contact regions 15 and the emitter regions 12 are alternatelyarranged along the Y axis direction in a region sandwiched by the baseregions 14-e at both ends in the Y axis direction in the mesa portion60-1 of the transistor portion 70 in this example. Each of the contactregions 15 and the emitter regions 12 is formed from one trench portionup to the other trench portion which are adjacent to each other.

The contact region 15 having a larger area than the contact region 15 ofthe mesa portion 60-1 is disposed in one or more mesa portions 60-2among the mesa portions 60 of the transistor portion 70 which aredisposed at the boundary with the diode portion 80. The emitter region12 may not be disposed in the mesa portion 60-2. In the mesa portion60-2 in this example, the contact region 15 is disposed in the entireregion sandwiched by the base regions 14-e.

The contact hole 54 is formed above each of the contact regions 15 andthe emitter regions 12 in each of the mesa portions 60-1 in thetransistor portions 70 in this example. The contact hole 54 in the mesaportion 60-2 is formed above the contact region 15. The contact hole 54is not formed in regions corresponding to the base region 14-e and thewell region 11 in each of the mesa portions 60. The contact holes 54 inthe respective mesa portions 60 in the transistor portion 70 may havethe same length in the Y axis direction.

An N+ type cathode region 82 is formed in a region in contact with thelower surface of the semiconductor substrate 10 in the diode portion 80.In FIG. 2 , the region where the cathode region 82 is formed isindicated by a broken line. The P+ type collector region may be formedin a region where the cathode region 82 is not formed in the region incontact with the lower surface of the semiconductor substrate 10.

The transistor portion 70 may be a region where the mesa portion 60 inwhich the contact region 15 and the emitter region 12 are formed and aregion where the trench portion adjacent to the mesa portion 60 aredisposed in a region overlapped with the collector region in the Z axisdirection. It is noted however that the contact region 15 may bedisposed in the mesa portion 60-2 at the boundary with the diode portion80 instead of the emitter region 12.

The base region 14 is arranged on the upper surface of the mesa portion60-3 of the diode portion 80. It is noted however that the contactregion 15 may be disposed in a region adjacent to the base region 14-e.The contact hole 54 terminates above the contact region 15.

FIG. 3 is a drawing illustrating an example of a cross section takenalong B-B in FIG. 2 . The cross section taken along B-B is an XZ planeincluding the diode portion 80 and the transistor portion 70 and passingthrough the emitter region 12.

The semiconductor device 100 in this example includes the semiconductorsubstrate 10, an interlayer dielectric film 38, the emitter electrode52, and a collector electrode 24 in the cross section. The interlayerdielectric film 38 is formed so as to cover at least a part of the uppersurface of the semiconductor substrate 10. A through-hole such as thecontact hole 54 is formed in the interlayer dielectric film 38. Theupper surface of the semiconductor substrate 10 is exposed by thecontact hole 54. The interlayer dielectric film 38 may be silicate glasssuch as PSG or BPSG, or may be an oxide film, a nitride film, or thelike.

The emitter electrode 52 is formed on upper surfaces of thesemiconductor substrate 10 and the interlayer dielectric film 38 in thetransistor portion 70 and the diode portion 80. The emitter electrode 52is also formed inside the contact hole 54, and is in contact with theupper surface 21 of the semiconductor substrate 10 which is exposed bythe contact hole 54.

The collector electrode 24 is formed on a lower surface 23 of thesemiconductor substrate 10. The collector electrode 24 may be in contactwith the entire lower surface 23 of the semiconductor substrate 10. Theemitter electrode 52 and the collector electrode 24 are formed of aconductive material such as a metal. In the present specification, adirection of the line connecting the emitter electrode 52 and thecollector electrode 24 is referred to as a depth direction (Z axisdirection). A direction from the collector electrode 24 towards theemitter electrode 52 is set as a positive Z axis direction.

The P− type base region 14 is formed on the upper surface side of thesemiconductor substrate 10 in the diode portion 80 and the transistorportion 70. An N− type drift region 18 is arranged below the base region14 inside the semiconductor substrate 10. Each of the trench portions isdisposed penetrating from the upper surface of the semiconductorsubstrate 10 through the base region 14 to reach the drift region 18.

The N+ type emitter region 12, the P− type base region 14, and an N+type accumulation region 16 are arranged in the stated order from theupper surface side of the semiconductor substrate 10 in each of the mesaportions 60-1 of the transistor portion 70 in the cross section. Donoris accumulated in the accumulation region 16 at a higher concentrationthan in the drift region 18. The drift region 18 is disposed below theaccumulation region 16. The accumulation region 16 may be disposed so asto cover an entire lower surface of the base region 14 in each of themesa portions 60. In other words, the accumulation region 16 may besandwiched by the trench portions in the X axis direction. When theaccumulation region 16 having the higher concentration than the driftregion 18 is disposed between the drift region 18 and the base region14, it is possible to reduce an ON voltage in the transistor portion 70by increasing a carrier injection enhancement effect (IE effect,Injection-Enhancement effect).

It is noted that in an XZ cross section passing through the contactregion 15 of the transistor portion 70, the contact region 15 isdisposed in each of the mesa portions 60-1 of the transistor portion 70instead of the emitter region 12. In addition, the contact region 15 isdisposed in the mesa portion 60-2 instead of the emitter region 12. Thecontact region 15 may function as a latch-up suppressing layer thatsuppresses latch-up.

The P− type base region 14 and the N+ type accumulation region 16 arearranged in sequence from the upper surface side of the semiconductorsubstrate 10 in each of the mesa portions 60-3 of the diode portion 80in the cross section. The drift region 18 is disposed below theaccumulation region 16. The accumulation region 16 may not be disposedin the diode portion 80.

A P+ type collector region 22 is disposed in a region adjacent to thelower surface 23 of the semiconductor substrate 10 in the transistorportion 70. The N+ type cathode region 82 is disposed in the regionadjacent to the lower surface 23 of the semiconductor substrate 10 inthe diode portion 80.

In the semiconductor substrate 10 in this example, an N+ type bufferregion 20 is disposed between the drift region 18 and the collectorregion 22, and between the drift region 18 and the cathode region 82.The doping concentration of the buffer region 20 is higher than thedoping concentration of the drift region 18. The buffer region 20 mayfunction as a field stop layer that avoids a state where a depletedlayer spreading from the lower surface of the base region 14 reaches theP+ type collector region 22 and the N+ type cathode region 82.

One or more gate trench portions 40 and one or more dummy trenchportions 30 are formed in the vicinity of the upper surface 21 of thesemiconductor substrate 10. Each of the trench portions penetratesthrough the base region 14 from the upper surface 21 of thesemiconductor substrate 10 to reach the drift region 18. In regionswhere at least any one of the emitter region 12, the contact region 15,and the accumulation region 16 is disposed, each of the trench portionspenetrates through these regions to reach the drift region 18. Astructure where the trench portions penetrate through the doping regionis not limited to one fabricated by first forming the doping region, andthen forming the trench portions. A structure fabricated by forming thedoping region after the trench portions are formed is also included inthe structure where the trench portions penetrate through the dopingregion.

The gate trench portion 40 includes a gate trench, a gate dielectricfilm 42, and a gate conductive portion 44 that are formed on the uppersurface side of the semiconductor substrate 10. The gate dielectric film42 is formed so as to cover an inner wall of the gate trench. The gatedielectric film 42 may be formed by oxidizing or nitriding thesemiconductor on the inner wall of the gate trench. The gate conductiveportion 44 is formed on an inner side with respect to the gatedielectric film 42 inside the gate trench. In other words, the gatedielectric film 42 insulates the gate conductive portion 44 from thesemiconductor substrate 10. The gate conductive portion 44 is formed ofa conductive material such as polysilicon.

The gate conductive portion 44 includes regions along the depthdirection which face at least the adjacent base region 14 across thegate dielectric film 42. The gate trench portion 40 in the cross sectionis covered with the interlayer dielectric film 38 on the upper surfaceof the semiconductor substrate 10. When a predetermined voltage isapplied to the gate conductive portion 44, a channel based on aninversion layer for electrons is formed on the surface layer of theboundary in contact with the gate trench in the base region 14.

The dummy trench portion 30 may have the same structure as the gatetrench portion 40 in the cross section. The dummy trench portion 30includes a dummy trench, a dummy dielectric film 32 and a dummyconductive portion 34 formed in the vicinity of the upper surface 21 ofthe semiconductor substrate 10. The dummy dielectric film 32 is formedto cover an inner wall of the dummy trench. The dummy conductive portion34 is formed inside the dummy trench, and also formed on an inner sidewith respect to the dummy dielectric film 32. The dummy dielectric film32 insulates the dummy conductive portion 34 from the semiconductorsubstrate 10. The dummy conductive portion 34 may be formed of the samematerial as the gate conductive portion 44. For example, the dummyconductive portion 34 is formed of a conductive material such aspolysilicon. The dummy conductive portion 34 may have the same length asthe gate conductive portion 44 in the depth direction. The dummy trenchportion 30 in the cross section is covered with the interlayerdielectric film 38 on the upper surface 21 of the semiconductorsubstrate 10. It is noted that bottoms of the dummy trench portion 30and the gate trench portion 40 may have a curved shape that is convexdownward (curved shape in the cross section).

FIG. 4 is an enlarged view of an area in the vicinity of a region B inFIG. 1 . The region B is a region including the pad (in this example,the cathode pad 117), the second gate runner 51 arranged along a firstside 132 of the pad, the first gate runner 50, and the inter-pad region130. The region B faces the transistor portion 70 in the main activeportion 120 in the Y axis direction and does not face the diode portion80. In addition, the first side 132 of the cathode pad 117 is a side inparallel with the Y axis direction.

The second gate runner 51 is arranged between the first side 132 of thecathode pad 117 and the inter-pad region 130. The well region 11 may beexposed on the upper surface of the semiconductor substrate 10 betweenthe second gate runner 51 and the cathode pad 117.

As described above, the gate trench portion 40 disposed in the inter-padregion 130 is directly or indirectly connected to the first gate runner50. The edge portion 41 of the gate trench portion 40 in this example isarranged below the third gate runner 48 and connected to the third gaterunner 48.

The gate trench portion 40 disposed in the inter-pad region 130 may be atrench portion obtained by extension of the gate trench portion 40disposed in the main active portion 120 in the Y axis direction. Inother words, the gate trench portion 40 in the main active portion 120may be continuous to the gate trench portion 40 in the inter-pad region130.

In addition, the dummy trench portion 30 may also be disposed in theinter-pad region 130. With regard to the dummy trench portion 30 too,the dummy trench portion 30 disposed in the main active portion 120 maybe disposed extending up to the inter-pad region 130. The well region 11is disposed below the first gate runner 50. The well region 11 extendsin the Y axis direction and is also disposed in a part of the inter-padregion 130. The edge portion 31 of the dummy trench portion 30 isdisposed in a position to be overlapped with the well region 11. Theemitter electrode 52 is also disposed from the main active portion 120up to the position to be overlapped with the well region 11. The edgeportion 31 of the dummy trench portion 30 is connected to the emitterelectrode 52 via the contact hole 56. It is noted that the well region11 is also disposed below the second gate runner 51, and the well region11 extends in the X axis direction to be also disposed in a part of theinter-pad region 130.

The structure of each of the mesa portions 60 in the inter-pad region130 may be the same as the structure of the mesa portion 60 in the mainactive portion 120 which has been described with reference to FIG. 2 andFIG. 3 . The contact regions 15 and the emitter regions 12 arealternately disposed on the upper surface of the mesa portion 60-1 inthe inter-pad region 130 in the Y axis direction.

In addition, in the inter-pad region 130, the dummy trench portion 30may be disposed between the gate trench portion 40 arranged which is theclosest to the cathode pad 117 in the X axis direction and the cathodepad 117. The mesa portion 60-2 in which the emitter region 12 is notdisposed is arranged to be adjacent to the dummy trench portion 30. Aplurality of the mesa portions 60-2 may be arranged in the X axisdirection. Thus, an interval between the pad and the emitter region 12can be increased in the inter-pad region 130.

In addition, in the inter-pad region 130, the contact hole 54 may bedisposed between the gate trench portion 40 which is the closest to thecathode pad 117 in the X axis direction and the cathode pad 117. Inaddition, in the inter-pad region 130, the contact hole 54 may bedisposed between the dummy trench portion 30 which is the closest to thecathode pad 117 in the X axis direction and the cathode pad 117. In theinter-pad region 130, the contact hole 54 may be disposed between thetrench portion which is the closest to the cathode pad 117 in the X axisdirection and the cathode pad 117.

In addition, the mesa portion 60 continuously disposed from the mainactive portion 120 up to the inter-pad region 130 in the Y axisdirection may have the same structure in the main active portion 120 andthe inter-pad region 130 excluding a distal end part in the Y axisdirection. For example, the contact regions 15 and the emitter regions12 may be alternately disposed in the Y axis direction on the uppersurface of the mesa portion 60-1 in both the main active portion 120 andthe inter-pad region 130.

In addition, the structure of the mesa portion 60 may vary in theinter-pad region 130 and the main active portion 120. For example, withregard to a part of the mesa portions 60-2, the emitter region 12 is notdisposed in the inter-pad region 130, and the contact regions 15 and theemitter regions 12 may also be alternately arranged in the main activeportion 120.

FIG. 5 is an enlarged view of an area in the vicinity of a region C inFIG. 1 . The region C is a region including the pad (in this example,the cathode pad 117), the second gate runner 51 arranged along a secondside 134 of the pad, and the transistor portion 70 and the diode portion80 of the main active portion 120. In addition, the second side 134 ofthe cathode pad 117 is a side in parallel with the X axis direction, andis a side facing the main active portion 120.

The second gate runner 51 is arranged between the second side 134 of thecathode pad 117, and the transistor portion 70 and the diode portion 80.The well region 11 may be exposed on the upper surface of thesemiconductor substrate 10 between the second gate runner 51 and thecathode pad 117.

As described above, the gate trench portion 40 arranged so as to facethe second gate runner 51 in the Y axis direction is directly orindirectly connected to the second gate runner 51. The edge portion 41of the gate trench portion 40 in this example is disposed below thethird gate runner 48 and connected to the third gate runner 48.

In addition, the well region 11 is disposed below the second gate runner51, and the well region 11 extends in the Y axis direction and isdisposed up to a side of the main active portion 120 with respect to thesecond gate runner 51. The edge portion 31 of the dummy trench portion30 is disposed in a position to be overlapped with the well region 11.The edge portion 31 of the dummy trench portion 30 is connected to theemitter electrode 52 via the contact hole 56.

In accordance with the structures illustrated in FIG. 4 and FIG. 5 , itis facilitated that each of the gate trench portions 40 is directly orindirectly connected to the metallic first gate runner 50 and themetallic second gate runner 51. Thus, delay and attenuation variationsof the gate voltages applied to the respective gate trench portions 40can be reduced.

In addition, a distance D1 between the pad and the second gate runner 51in the top view may be 200 μm or shorter. The distance D1 may be 150 μmor shorter, may be 120 μm or shorter, or may also be 100 μm or shorter.In addition, the distance D1 may be 1.5 times as long as a thickness ofthe semiconductor substrate 10 in the Z axis direction or shorter, ormay also be the same length as the thickness of the semiconductorsubstrate 10 or shorter. The distance D1 in the Y axis direction maysatisfy the above-described condition, and the distance D1 in the X axisdirection may also satisfy the above-described condition. When thedistance between the pad and the second gate runner 51 is decreased, thearea of the active region can be increased.

FIG. 6 is a drawing illustrating an arrangement example of the emitterelectrode 52 in the top view. The emitter electrode 52 may be disposedabove the main active portion 120 and at least a part of the inter-padregion 130. The emitter electrode 52 in this example is not disposedabove the inter-pad region 130 in which the current sensing device 119is disposed. In addition, the emitter electrode 52 may also be disposedin a position to be overlapped with the emitter pad 115.

FIG. 7 is a drawing illustrating an arrangement example of the cathoderegion 82. The cathode region 82 is not disposed in the inter-pad region130 in this example. In other words, the cathode region 82 disposed inthe main active portion 120 does not extend up to the inter-pad region130 to be disposed there. It is noted however that the structure of thediode portion 80 excluding the cathode region 82 may be disposed in theinter-pad region 130. In accordance with the above-mentioned structure,a distance between the N+ type cathode region 82 and the P+ type wellregion 11 that is relatively deeply formed can be secured, and withstandpressure reduction caused since the device region is disposed in theinter-pad region 130 can be suppressed.

It is noted that the cathode region 82-1 arranged so as to face theinter-pad region 130 in the Y axis direction may be disposed to belonger in the Y axis direction than the cathode region 82-2 arranged soas to face the pad or the second gate runner 51 in the Y axis direction.It is noted however that the cathode region 82-1 does not extend up tothe inter-pad region 130. Thus, while the area of the cathode region 82is increased, it is facilitated to secure the distance between thecathode region 82 and the well region 11.

It is noted that each of the plurality of pads arranged along the firstend side 142 may be disposed in such a position that the pad at leastpartially faces the diode portion 80 (cathode region 82) in the Y axisdirection. Thus, it is facilitated that the structure of the transistorportion 70 disposed in the main active portion 120 is disposed extendingup to the inter-pad region 130. For this reason, the area of thetransistor portion 70 can be easily increased.

In addition, a distance D2 between the pad arranged at the farthest endin the X axis direction and the first gate runner 50 in the X axisdirection may be 500 μm or shorter. When the pad is arranged to be closeto the first gate runner 50, the inter-pad region 130 can be enlarged inthe X axis direction. The distance D2 may be 300 μm or shorter, may be200 μm or shorter, or may also be 100 μm or shorter. The distance D2 maybe 1.5 times as long as the thickness of the semiconductor substrate 10or shorter, or may also be the same length as the thickness of thesemiconductor substrate 10 or shorter.

FIG. 8 is an enlarged view of an area in the vicinity of a region D inFIG. 7 . The region D is a region facing the diode portion 80 and thetransistor portion 70 of the main active portion 120 in the Y axisdirection in the inter-pad region 130.

As described with reference to FIG. 7 , the cathode region 82 is notdisposed in the inter-pad region 130. It is noted however that the dummytrench portion 30 of the diode portion 80 arranged so as to face theinter-pad region 130 in the Y axis direction is disposed extending up tothe inter-pad region 130. In addition, the mesa portion 60-3 of thediode portion 80 is also disposed extending up to the inter-pad region130.

In accordance with the above-mentioned structure, while structuralcontinuity is maintained between the inter-pad region 130 and the mainactive portion 120, the distance between the cathode region 82 and thewell region 11 can be secured. When the structural continuity ismaintained, it is possible to suppress local concentration of theelectric field.

FIG. 9 is a drawing illustrating another arrangement example of thecathode region 82. The cathode region 82 is disposed in the inter-padregion 130 in this example. For example, the cathode region 82 disposedin the main active portion 120 is disposed extending up to the inter-padregion 130. In accordance with the above-mentioned structure, the areaof the cathode region 82 is increased, and the device region operatingas the diode portion 80 can be enlarged.

It is noted that in a case where a distance between the cathode region82 and the well region 11 in the X axis direction becomes too close, itis preferable that the cathode region 82 of the main active portion 120does not extend up to the inter-pad region 130. In one example, under acondition that the distance between the cathode region 82 and the wellregion 11 in the X axis direction becomes 200 μm or or longer, thecathode region 82 may extend up to the inter-pad region 130. Thedistance may be 100 μm or longer, and may also be longer than thethickness of the semiconductor substrate 10.

FIG. 10 is an enlarged view of an area in the vicinity of a region E inFIG. 9 . The region E is a region facing the diode portion 80 and thetransistor portion 70 of the main active portion 120 in the Y axisdirection in the inter-pad region 130.

As described with reference to FIG. 9 , the cathode region 82 isdisposed in the inter-pad region 130. In addition, the dummy trenchportion 30 and the mesa portion 60-3 are also disposed extending up tothe inter-pad region 130. In accordance with the above-mentionedstructure, the area of the diode portion 80 can be increased.

FIG. 11 illustrates another example of the region B in FIG. 1 . In thisexample, the emitter region 12 is not disposed in contact with the gatetrench portion 40-1 which is the closest to the pad in the X axisdirection among the gate trench portions 40 disposed in the inter-padregion 130. Thus, the distance between the pad and the emitter region 12can be further increased. The contact region 15 may be disposed in themesa portion 60 adjacent to the gate trench portion 40-1 instead of theemitter region 12.

FIG. 12 is a drawing illustrating an arrangement example of the gatetrench portions 40 in the main active portion 120 and the inter-padregion 130. As described above, the gate trench portion 40 in theinter-pad region 130 and the gate trench portion 40 in the main activeportion 120 may be continuously disposed. Similarly, the dummy trenchportions 30 may also be continuously disposed in the inter-pad region130 and the main active portion 120.

FIG. 13 is a drawing illustrating another arrangement example of thegate trench portions 40 in the main active portion 120 and the inter-padregion 130. In this example, the gate trench portion 40 in the inter-padregion 130 is separated from the gate trench portion 40 of the mainactive portion 120. The gate trench portion 40 in the inter-pad region130 may be disposed extending in the X axis direction. The gate trenchportion 40 in the inter-pad region 130 may be directly or indirectlyconnected to the second gate runner 51 disposed in the Y axis direction.The gate trench portion 40 in this example is directly or indirectlyconnected to the second gate runner 51 disposed at both ends of theinter-pad region 130 in the X axis direction. The dummy trench portion30 in the inter-pad region 130 may also be disposed extending in adirection in parallel with the gate trench portion 40.

It is noted that the gate trench portion 40 of the main active portion120 which faces the inter-pad region 130 in the Y axis direction may beconnected to the third gate runner 48 arranged between the inter-padregion 130 and the main active portion 120. The third gate runner 48 isconnected to the second gate runners 51 disposed at both ends of theinter-pad region 130 in the X axis direction. In accordance Inaccordance with the above-mentioned structure too, each of the gatetrench portions 40 can be connected to the gate runner portion.

FIG. 14 is a drawing illustrating another arrangement example of thegate trench portions 40 in the main active portion 120 and the inter-padregion 130. In this example, the gate trench portion 40 in the inter-padregion 130 is separated from the gate trench portion 40 of the mainactive portion 120. In this example, the gate trench portion 40 in theinter-pad region 130 is disposed extending in the Y axis direction.

The gate trench portion 40 in the inter-pad region 130 may be connectedto the first gate runner 50. The gate trench portion 40 of the mainactive portion 120 which faces the inter-pad region 130 in the Y axisdirection may be connected to the third gate runner 48 arranged betweenthe inter-pad region 130 and the main active portion 120. In accordanceIn accordance with the above-mentioned structure too, each of the gatetrench portions 40 can be connected to the gate runner portion.

While the embodiments of the present invention have been described, thetechnical scope of the invention is not limited to the above describedembodiments. It is apparent to persons skilled in the art that variousalterations and improvements can be added to the above-describedembodiments. It is also apparent from the scope of the claims that theembodiments added with such alterations or improvements can be includedin the technical scope of the invention.

The operations, procedures, steps, and stages of each process performedby an apparatus, system, program, and method shown in the claims,embodiments, or diagrams can be performed in any order as long as theorder is not indicated by “prior to,” “before,” or the like and as longas the output from a previous process is not used in a later process.Even if the process flow is described using phrases such as “first” or“next” in the claims, embodiments, or diagrams, it does not necessarilymean that the process must be performed in this order.

EXPLANATION OF REFERENCES

10 . . . semiconductor substrate, 11 . . . well region, 12 . . . emitterregion, 14 . . . base region, 15 . . . contact region, 16 . . .accumulation region, 18 . . . drift region, 20 . . . buffer region, 21 .. . upper surface, 22 . . . collector region, 23 . . . lower surface, 24. . . collector electrode, 25 . . . connecting portion, 29 . . . linearportion, 30 . . . dummy trench portion, 31 . . . edge portion, 32 . . .dummy dielectric film, 34 . . . dummy conductive portion, 38 . . .interlayer dielectric film, 39 . . . linear portion, 40 . . . gatetrench portion, 41 . . . edge portion, 42 . . . gate dielectric film, 44. . . gate conductive portion, 48 . . . third gate runner, contact hole,50 . . . first gate runner, 51 . . . second gate runner, 52 . . .emitter electrode, 54 . . . contact hole, 56 . . . contact hole, 60 . .. mesa portion, 70 . . . transistor portion, 80 . . . diode portion, 82. . . cathode region, 90 . . . edge terminal structure portion, guardring, 100 . . . semiconductor device, 110 . . . temperature sensingportion, 112 . . . temperature sensing wiring, 114 . . . sensing pad,115 . . . emitter pad, 116 . . . gate pad, 117 . . . cathode pad, 118 .. . anode pad, 119 . . . current sensing device, 120 . . . main activeportion, 130 . . . inter-pad region, 132 . . . first side, 134 . . .second side, 140 . . . outer peripheral end, 142 . . . first end side

What is claimed is:
 1. A semiconductor device comprising: a first paddisposed above an upper surface of a semiconductor substrate; a gatetrench portion disposed on the upper surface of the semiconductorsubstrate and arrayed in a predetermined array direction, the gatetrench portion including: a first gate trench portion extending in afirst direction toward the first pad, an edge portion of the first gatetrench portion facing the first pad; and a second gate trench portionextending beyond the edge portion of the first gate trench portion inthe first direction; a first gate runner disposed above the uppersurface of the semiconductor substrate, an edge portion of the secondgate trench portion in the first direction being connected to the firstgate runner; a second gate runner disposed above the upper surface ofthe semiconductor substrate, the edge portion of the first gate trenchportion in the first direction being connected to the second gaterunner; and a third gate runner disposed above the upper surface of thesemiconductor substrate, the third gate runner extending from the secondgate runner in the array direction, wherein at least a part of thesecond gate trench portion extends passing below the third gate runnerin the first direction.
 2. The semiconductor device according to claim1, wherein the first gate runner is a metallic wiring.
 3. Thesemiconductor device according to claim 2, wherein the second gaterunner includes a material same as the first gate runner.
 4. Thesemiconductor device according to claim 3, wherein the third gate runnerincludes a material same as the first gate runner.
 5. The semiconductordevice according to claim 3, wherein the third gate runner is asemiconductor wiring.
 6. The semiconductor device according to claim 1,further comprising: a dummy trench portion disposed on the upper surfaceof the semiconductor substrate and arrayed in the array direction at apredetermined interval, wherein the dummy trench portion includes: afirst dummy trench portion extending in the first direction, an edgeportion of the first dummy trench portion facing the first pad; and oneor more second dummy trench portions extending beyond the edge portionof the first dummy trench portion in the first direction, and at least apart of the one or more second dummy trench portions extends passingbelow the third gate runner in the first direction.
 7. The semiconductordevice according to claim 6, wherein the one or more second dummy trenchportions are disposed, in the array direction, between the first pad andthe second gate trench portion closest to the first pad.
 8. Thesemiconductor device according to claim 6, wherein the one or moresecond dummy trench portions are disposed, in the array direction,between the first pad and the second gate trench portion closest to thefirst pad, and a mesa portion is provided between two adjacent seconddummy trench portions among the one or more second dummy trenchportions.
 9. The semiconductor device according to claim 8, wherein themesa portion does not include an emitter region.
 10. The semiconductordevice according to claim 9, wherein the mesa portion includes a contacthole.
 11. The semiconductor device according to claim 8, wherein thefirst pad has a first side, a second side, a third side, and a fourthside, the first side and the third side being in parallel with eachother, and the second side and the fourth side being in parallel witheach other.
 12. The semiconductor device according to claim 11, whereinthe second gate runner is disposed along the second side of the firstpad.
 13. The semiconductor device according to claim 12, wherein thesecond gate runner is disposed further along the first side and thethird side of the first pad, and the third gate runner extends more thanthe second gate runner in the array direction.
 14. The semiconductordevice according to claim 13, further comprising: an emitter electrodedisposed above the upper surface of the semiconductor substrate; and awell region disposed below the second gate runner, wherein an edgeportion of the well region is disposed (i) between the second gaterunner and the one or more second dummy trench portions in the arraydirection when viewed from above and (ii) below the emitter electrode.15. The semiconductor device according to claim 1, wherein the secondgate trench portion extends to a first region that overlaps a regionobtained by extending the first pad in the array direction.
 16. Thesemiconductor device according to claim 6, wherein the second gatetrench portion extends to a first region that overlaps a region obtainedby extending the first pad in the array direction, and the one or moresecond dummy trench portions extend to the first region.
 17. Thesemiconductor device according to claim 1, wherein the first pad is acathode pad or an anode pad.
 18. The semiconductor device according toclaim 1, wherein the first pad is a gate pad to which the first gaterunner, the second gate runner, and the third gate runner are connected.19. The semiconductor device according to claim 1, wherein the thirdgate runner is disposed in parallel with the first gate runner whenviewed from above.
 20. The semiconductor device according to claim 1,wherein at least a part of the second gate trench portion is connectedto the third gate runner.
 21. The semiconductor device according toclaim 1, wherein the first direction is perpendicular to the arraydirection.
 22. The semiconductor device according to claim 1, furthercomprising: a second pad disposed above the upper surface of thesemiconductor substrate and formed alongside of the first pad in thearray direction.